发明名称 INTEGRATED CIRCUIT
摘要 PURPOSE: An integrated circuit is provided together with its manufacturing method where electro-migration property of the conductive structure is improved. CONSTITUTION: The integrated circuit substrate(10) comprises a first dielectrics formed in a first dielectrics layer(40) and a first flattened layer(45) formed of a material different from a first material layer (30) and the first dielectrics layer(40) formed over it. By the same process, another layers including the second dielectrics layer(90), material layer(80) and flattened layer(95) are formed. Here, the material of the first material layer(30) has a larger Young's modulus than that of the first dielectrics layer(40).
申请公布号 KR20010021456(A) 申请公布日期 2001.03.15
申请号 KR20000050372 申请日期 2000.08.29
申请人 LUCENT TECHNOLOGIES INC. 发明人 KISHAOJUN DEN;JA SHEN;ANTHONY STEPHAN OTIS
分类号 H01L21/3205;H01L21/768;H01L21/822;H01L23/522;H01L27/04;(IPC1-7):H01L21/320 主分类号 H01L21/3205
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