摘要 |
A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90 DEG counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45 DEG , and the other type having an offset of -45 DEG with respect to the X-direction. The magnet configuration causes a very strong magnetic field.
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申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V.;ASM LITHOGRAPHY B.V. |
发明人 |
FRISSEN, PETRUS, C., M.;COMPTER, JOHAN, C.;PEIJNENBURG, ANTONIUS, T., A.;LOOPSTRA, ERIK, R. |