METHOD FOR MANUFACTURING CAPACITOR

摘要

PURPOSE: A method for manufacturing a capacitor is provided to increase an effective surface area of the capacitor, by having a storage electrode of the capacitor have a wrinkled shape, thereby by increasing capacitance. CONSTITUTION: A multilayered insulating layer(218) is formed on an insulating layer(210) having a contact plug(214) by alternatively and repeatedly depositing insulating layers(218a-218g) having different wet-etch selectivity. The multilayered insulating layer is etched to form an opening(220) by a photo process. The inside wall of the opening is further etched to have a wrinkled shape. The thickness of the multilayered insulating layer is from 3000 to 20000 angstrom.