| 摘要 |
PURPOSE: A plasma polymerization device is provided to improve productivity and quality of products by providing a means which can simultaneously treat positive ions and negative ions during surface treatment using plasma, thereby using merits of each ions. CONSTITUTION: A plasma polymerization device comprises an electrode in which each cathode and anode are alternatively arranged on both surfaces of upper and lower sides of a sample (2) of which surface is treated in an opposite direction. An existing plasma polymerization device treating single characteristics only with negative ions or positive ions alone can be changed into a plasma polymerization device treating composite characteristics with both of negative ions and positive ions when surface is treated using plasma since the alternatively arranged electrodes are structured so that cathode and anode opposite to the sample are alternatively arranged. Therefore, a plasma polymerized film of high quality is produced by mixed coating, thereby greatly improving productivity and quality of products.
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