发明名称 |
METHOD OF MOUNTING ELECTRONIC DEVICE ELEMENT AND MANUFACTURE OF SURFACE ACOUSTIC WAVE DEVICE |
摘要 |
PURPOSE: Disclosed is a method of mounting an electronic device element for forming an electronic component of small size and can bond an electronic device element to a packaging box having high reliability and has satisfactory electronic characteristics. CONSTITUTION: This method is for mounting an electronic device element in a packaging box(35) by applying ultrasonic waves to the element, while putting the pressing surface of a bonding tool(37) onto the bottom of the electronic device element having a metal bump(34) on its obverse surface. Here, the maximum length of the pressing surface of the bonding tool in the direction of vibration of the ultrasonic waves is larger than 0.5 times the maximum length of the bottom of the electronic device element in the direction of vibration of the ultrasonic waves. The pressing surface of the bonding tool has a hole(38) for vacuum-chucking the electronic device element, the hole(38) being positioned at the bottom of a portion where the metal bump of the element is not formed, when the electronic device element is vacuum-chucked. |
申请公布号 |
KR20010021017(A) |
申请公布日期 |
2001.03.15 |
申请号 |
KR20000034469 |
申请日期 |
2000.06.22 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
TAGA SHIGETO;SHIMOE KAZUNOBU;KITA RYOICHI |
分类号 |
G01N21/25;G01N21/47;G01N21/89;G01N21/898;H01L21/60;H01L21/607;H03H3/08;(IPC1-7):H03H3/08 |
主分类号 |
G01N21/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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