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发明名称
PRE-METAL DIELECTRIC RAPID THERMAL PROCESSING FOR SUB-MICRON TECHNOLOGY
摘要
<p>In order to reflow silicate glass with low thermal budget, the atmosphere contained in the RTP system comprises steam in combination with a reactive gas.</p>
申请公布号
WO2001018848(A2)
申请公布日期
2001.03.15
申请号
IB2000001242
申请日期
2000.09.01
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发明人
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