| 摘要 |
PURPOSE: A method is provided to realize a method for arranging substrates by which the width of arrangement of the total substrates can be reduced by nanowing the intervals between the substrate. CONSTITUTION: A method for arranging wafers W comprises a step of separating wafers W, arranged and housed in a carrier C at equal intervals L, into a first substrate group in which wafers W are arranged with the equal intervals L and a second wafer group, in which the wafers W are arranged with equal intervals L, a step of turning the second substrate group around by 180°C, and a step of inserting each wafer W of the first substrate group between wafers of the second substrate group, to form a third substrate group in which wafers are arranged at equal intervals L/2, with approximately half the equal intervals L.
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