Vacuum deposition apparatus comprises several sections arranged next to each other via a lock and evacuated via a suction opening connected directly or via a pipe system to a vacuum pump

摘要

Vacuum deposition apparatus consists of several sections arranged next to each other via a lock (2). The sections can be evacuated via a suction opening (6) connected directly or via a pipe system to a vacuum pump (13). The opening is arranged above the target (16) in the lid (7). Preferred Features: The lid has a sealed flange (9) surrounding the opening. The vacuum pump is arranged on the lid.