WAFER CASSETTE FOR SINTERING SILICA

摘要

PURPOSE: A wafer cassette for sintering silica is provided to improve productivity and to minimize impurities inside the wafer cassette, by stacking a plurality of silica substrates. CONSTITUTION: Columns(104) are vertically installed at regular intervals between an upper plate(101) of a disc type and a lower plate(102) of a disc type. The columns have at least one stacking unit lengthwise to stack at least one silica substrate. A circular supporting plate is installed on the lower plate. A handle for carrying is installed in a predetermined position of the upper plate.