| 摘要 |
PURPOSE: An align mark is provided to shorten time taken for alignment in an exposure process, by simultaneously measuring an X-axis align mark and a Y-axis align mark at a time. CONSTITUTION: X-axis align marks(31,32,33) having the same widths and different lengths are disposed in the X-axis direction and separated from each other by a constant interval. Y-axis align marks(34,35,36) having the same lengths and different widths are disposed in the Y-axis direction and separated from each other by a constant interval, connected to the respective X-axis align mark.
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