| 摘要 |
PURPOSE: A plasma polymerization device equipped with an electrode vibrating means is provided to prevent spark generation and produce uniformed products during continuous plasma polymerization by installing a vibrating means in an existing plasma polymerization device. CONSTITUTION: A plasma polymerization device equipped with an electrode vibrating means comprises a deposition chamber equipped with a sample used as an electrode, a counter electrode (4) which is oppositely positioned on upper and lower sides of the sample, and a vibrating means which is installed on one end of the counter electrode (4), a vacuum pump for controlling pressure of a vacuum chamber, and a gas controller infusing a reactive gas and a nonreactive gas around a sample of which surface is treated. The vibrating means comprises a motor (15), a motor fixing frame (16) which is connected to one end of the motor (15), and attached to one end of the counter electrode (4), and a motor rotation fan (17) which is connected to end of other side of the motor (15).
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