发明名称 |
Carbon nanotube - metal contact with low contact resistance |
摘要 |
A metal to Carbon nanotube contact region is described that comprises a chemical bond between the metal and the Carbon nanotube.
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申请公布号 |
US2006223243(A1) |
申请公布日期 |
2006.10.05 |
申请号 |
US20050095829 |
申请日期 |
2005.03.30 |
申请人 |
RADOSAVLJEVIC MARKO;BRASK JUSTIN;DATTA SUMAN;MAJUMDAR AMLAN;CHAU ROBERT S |
发明人 |
RADOSAVLJEVIC MARKO;BRASK JUSTIN;DATTA SUMAN;MAJUMDAR AMLAN;CHAU ROBERT S. |
分类号 |
H01L21/84;H01L21/00 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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