发明名称 |
Micro-electromechanical structure insensitive to mechanical stresses. |
摘要 |
<p>A microelectromechanical structure (40) includes a rotor element (22) having a barycentric axis (G) and suspended regions (25) arranged a distance with respect to the barycentric axis. The rotor element (22) is supported and biased via a suspension structure (30, 45, 49) having a single anchoring portion (49) extending along the barycentric axis (G). The single anchoring portion (49; 73; 92) is integral with a body (41) of semiconductor material on which electric connections (50a) are formed. <IMAGE> <IMAGE></p> |
申请公布号 |
EP1083144(A1) |
申请公布日期 |
2001.03.14 |
申请号 |
EP19990830565 |
申请日期 |
1999.09.10 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
ZERBINI, SARAH;SASSOLINI, SIMONE;VIGNA, BENEDETTO |
分类号 |
B81B3/00;G01C19/5684;G01P15/00;G01P15/08;G01P15/125;H01L29/84;(IPC1-7):B81B5/00;G01P15/135;G01C19/56 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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