| 摘要 |
<p>A monolithic inductor (20, 20') is formed over a silicon or other substrate (22). The inductor (20, 20') includes at least one coil (62, 78) arranged so that its axis (58) is parallel to the substrate (22). Other inductive features, such as other coils (64, 70, 72) or planar spirals (74, 76) are arranged in series with the coil (62, 78) to guide magnetic flux lines away from the substrate (22). In one embodiment, a common thin film coil core (60) made from a magnetic material is provided for two coils (62, 64). The coil core (60) provides a continuous magnetic material flux path through the two coils (62, 64). In another embodiment, an axis (58) of the coil (78) is located between the plane in which two spirals (74, 76) are located and the substrate (22) to guide magnetic flux lines (82) away from the substrate (22).</p> |
