| 摘要 |
PROBLEM TO BE SOLVED: To provide excellent heat resistant strength by forming an insulating protective layer by arranging a detecting resistor for detecting that a ceramic base material is under prescribed condition and environment on a surface of the ceramic base material embedded with a heating resistor. SOLUTION: A ceramic heater 31 is formed of a ceramic base material 1 having a thickness of 2 mm, a heating resistor 2 embedded in this base material 1 and a detecting resistor 3 arranged on a surface of the base material 1, and is provided with current-carrying terminals 5a, 5b connected by brazing to both end parts of the heating resistor 2 and detecting terminals 6a, 6b connected by brazing to both end parts of the detecting resistor 3, and an insulating protective layer 4 of about 10μm is formed on a surface of the detecting resistor 3. The detecting resistor 3 is densely arranged more than the heating resistor 2 over the whole surface of the ceramic base material 1 for detecting a temperature and a crack of the ceramic base material 1 by commonly using a single pattern to thereby obtain excellent heat responsiveness, heat transfer rate and heat resistant strength.
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