| 摘要 |
PROBLEM TO BE SOLVED: To prevent a workpiece and a chuck from being overcooled with cold air when a table overruns by providing a cold air shielding body on the chuck right end side opposite to the chuck left side in the cold air blasting direction of a nozzle. SOLUTION: A grinding wheel 3 is provided at a rotating shaft of a grinding device, using a flange. While blasting cold air from a nozzle to the surface of a workpiece 2 fixed to an electromagnetic chuck 6 on a table, the rotating grinding wheel 3 is lowered to grind the workpiece 2 while reciprocating the table laterally and moving a saddle longitudinally. In this case, a cold air shielding body 60 is provided on the chuck right end side opposite to the left side in a cold air blasting direction. The height H of the cold air shielding body 60 needs to be almost equal to the height (h) of the workpiece 2, and the width (w) of the cold air shielding body 60 needs to be not less than an overrun distance I so as not to overcool the chuck right end.
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