Treating tank, and substrate treating apparatus having the treating tank

摘要

A treating tank includes injection pipes for injecting a treating liquid. Each injection pipe has a closed distal end, and a plurality of jet bores arranged along a side wall thereof for jetting, into the treating tank, the treating liquid introduced through a proximal end. Each injection pipe includes a liquid jetting pipe portion defining the jet bores and having an inside diameter larger than a bore diameter of a liquid inlet formed at the proximal end for introducing the treating liquid into the liquid jetting pipe portion. This construction provides a uniform head length of the treating liquid jetting from the jet bores into the treating tank to effect uniform treatment of substrates in the treating tank. Where each injection pipe includes a sloping pipe portion having an inside diameter gradually increasing from the liquid inlet to the liquid jetting pipe portion, a higher degree of uniformity is achieved for the head length of the treating liquid jetting from the jet bores into the treating tank. Each jet bore may include a slope portion having an inside diameter gradually decreasing from an inner wall toward an outside of the liquid jetting pipe portion.