发明名称 PRECONDITIONING OF FIXED ABRASIVE MEMBER
摘要 PROBLEM TO BE SOLVED: To provide an uniform and constant surface of a fixed abrasive member having projections of different heights on a surface of a backing layer, by comprising a step having upper surfaces of different textures, and a step for working the projections to provide them with substantially uniform textures on their upper surfaces. SOLUTION: In this method, a fixed abrasive member of initial condition having plural separated projections extended on a surface of a backing layer with different heights and respectively having upper surfaces different from each other in textures is prepared. Then the projections are worked by mechanical processing or the like to approximately unify the texture of the upper surfaces of the projections and the heights of the projections. After this preconditioning process, the fixed abrasive member 200 is provided with the backing layer having a surface 225 and plural separated projections 220a-220e having geometrical shape or structure and extended from the surface 225 of the backing member. The projections have the substantially uniform texture, and have plural abrasive elements having substantially uniform heights (B1, B2) from the surface 225.
申请公布号 JP2001062701(A) 申请公布日期 2001.03.13
申请号 JP20000134966 申请日期 2000.05.08
申请人 APPLIED MATERIALS INC 发明人 TIETZ JAMES V;LI SHIJIAN;BIRANG MANOOCHER;JOHN M WHITE;ROSENBERG LAWRENCE M;SCALES MARTIN;EMAMI RAMIN
分类号 B24B37/20;B24B53/007;B24B53/017;B24D3/00;B24D3/28;B24D3/34;B24D7/12;H01L21/302;H01L21/304 主分类号 B24B37/20
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