| 摘要 |
PROBLEM TO BE SOLVED: To certainly bond the diaphragm and silicon oxide film in an electrostatic actuator and to enhance a yield. SOLUTION: The individual electrode 12 is provided in opposed relation to a diaphragm 21 through a gap G and voltage is applied in between the diaphragm 21 and the individual electrode 12 to deform the diaphragm 21 by electrostatic force. The individual electrode 12 is provided in the recessed part 10A formed to a single crystal silicon substrate 10 and formed on the silicon oxide film 11 formed on the silicon substrate 10. The diaphragm 21 and the silicon oxide film 11 are provided so that a region 15 containing impurities of which the concn. is equal to or more than that of impurities of the silicon substrate is at least formed to the protruded region 10B of the silicon substrate and the silicon oxide film 11 formed on the protruded region 10B is bonded to the diaphragm 21.
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