| 摘要 |
A fiber optic micromechanical sensor (20) for sensing or measuring acceleration, force, or displacement is disclosed. The micromechanical sensor includes a base component (22) in which all physical features of the sensor - other than the at least one optical fiber - are integrally formed. The base component includes the following integral features: a frame (28), a movable mass structure (30) attached to the frame, a shutter (36) extending from a free end of the movable mass structure, and at least one fiber optic groove (38, 40) for receiving an optical fiber. The micromechanical sensor also includes an optical fiber (24, 26) which is secured within the at least one fiber optic groove of the base component. The movable mass structure is capable of being either vertically or horizontally displaced such that the shutter extending from the mass structure is capable of influencing the light propagating from the optical fiber. In particular, the shutter is capable of either partially or wholly reflecting light propagating from the optical fiber back into the same optical fiber or partially or wholly transmitting light to and blocking light from another optical fiber secured within another fiber optic groove. The at least one optical fiber, another fiber, or a combination of fibers are used to detect the intensity of the light after it has been externally influenced and are thus used for measuring parameters such as acceleration, force, or displacement. <IMAGE> |
