| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostriction film type actuator capable of obtaining large bending displacement by low voltage driving, excellent in response, having function as one electrode without exerting adverse effect on the bending displacement of the vibration plate and hardly damaging the vibration plate even in the repetition of bending displacement. SOLUTION: The surface roughness of a ceramic vibration plate 1 having a four-point bending strength of 100 MPa or more and a breaking toughness value of 3 MPa1/2 or more and having at least one crystal structure having conductivity among rutile, corundum and spinel type crystal structures is set to 0.1-1.0μm as center line average roughness Ra and an intermediate layer 2 containing 40 wt.% or more of platinum or palladium, a piezoelectric/ electrostriction film 3 and an electrode film 4 are successively laminated to the surface of the vibration plate integrally to form a drive part 5 to constitute a piezoelectric/electrostriction film type actuator.
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