发明名称 |
SEM image enhancement using narrow band detection and color assignment |
摘要 |
Disclosed is a system and method for enhancing edge, topography, and materials in SEM images. The enhancements are achieved by collecting secondary electrons at narrow energy bands. This allows construction of various "primary" images having specific features enhanced. Further enhancement is achieved by various manipulations and combinations of the "primary" images to obtain a final enhanced image. Yet further enhancements are achieved by assigning color to various "primary" images before constructing the final image.
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申请公布号 |
US6201240(B1) |
申请公布日期 |
2001.03.13 |
申请号 |
US19980186268 |
申请日期 |
1998.11.04 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DOTAN NOAM;SERULNIK SERGIO;SHACHAL DUBI |
分类号 |
H01J37/22;H01J37/244;(IPC1-7):H01J37/244 |
主分类号 |
H01J37/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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