发明名称 |
Microbridge structure and method for forming the microbridge structure |
摘要 |
The microbridge structure comprises a substrate layer provided with two first electrical contacts; a microstructure including a sensing area provided with two second electrical contacts; and a micro support for suspending the microstructure over and at a predetermined distance from the substrate layer. The micro support has two electrically conductive paths made of electrically conductive layers. The two electrically conductive paths connect respectively the two first electrical contacts of the substrate layer to the two second electrical contacts of the microstructure. The micro support extends generally underneath the microstructure, between the microstructure and the substrate layer. The invention also relates to a method for forming the microbridge structure.
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申请公布号 |
US6201243(B1) |
申请公布日期 |
2001.03.13 |
申请号 |
US19980119486 |
申请日期 |
1998.07.20 |
申请人 |
INSTITUT NATIONAL D'OPTIQUE |
发明人 |
JEROMINEK HUBERT |
分类号 |
G01J5/20;H01L27/146;H01L31/09;(IPC1-7):H01L31/18 |
主分类号 |
G01J5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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