Electrical contactor, especially wafer level contactor, using fluid pressure

摘要

A probe assembly comprises a flexible wiring substrate (633) including a plurality of electrical connections to a semiconductor tester; and a plurality of compliant, elongate probes (639) disposed on said substrate in a pattern corresponding to a pattern of test features on a semiconductor device (505) to be tested, wherein said wiring of said substrate interconnects ones of said probes with ones of said electrical connections to said semiconductor tester.