ACTIVATED PARTICLE GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To generate gas containing low concentration ozone and high concentration ions. SOLUTION: In an activated particle generating device provided with an activated particle generating chamber 5 for activating an incorporated gas by electric discharge generated by providing activated particle generating electrodes 7, 8 and supplying voltage to the electrodes, a pulse generator 23 for intermittently supplying voltage to the activated particle generating electrodes is provided and the generating quantity of ozone is changed while keeping the generating quantity of the ions constant by controlling the pulse frequency in the pulse generator 23. The gas containing <=0.1 ppm ozone and at least 104/cm3 ions is generated by controlling the pulse frequency in the pulse generator.