| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processing laser device which can stop irradiation of a laser light to a workpiece without installing a shutter mechanism, and prevent variation of output power of the laser light even if laser light irradiation to the workpiece is stopped. SOLUTION: When a workpiece is irradiated with a laser light, a mirror 8 is retreated to a solid line position. The laser light ejected from a wavelength converting element (nonlinear optical system crystal) 2 is incident on an fθlens 5 via an enlarging collimator 3 and a galvano mirror 4, and irradiates a workpiece 6. When the laser light irradiation to the workpiece 6 is stopped, the mirror 8 is inserted to a dotted line position. The laser light ejected from the wavelength converting element 2 is incident on the concave lens 9 via the enlarging collimator 3 and the mirror 8 so as to lower power density, and is incident on a laser light receiver 11 so as to absorb the energy. Instead of the mirror 8, a prism, a parallel plate and the like can be used.</p> |
