| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a synthetic quartz glass member for increasing a fixing rate of synthetic silica by adjusting the total gaseous oxygen amount of gaseous oxygen to be introduced through a center tube together with gaseous raw material and gaseous oxygen to be introduced through a second layer tube of a multi-layer tube or adjusting the ratio of the amounts of the gaseous oxygen to be introduced, respectively. SOLUTION: This production method of the synthetic quartz glass member comprises flame-hydrolyzing an organic silicon compound by an oxyhydrogen flame from a multi-layer tube burner, stacking the produced synthetic silica fine powder and melting the powder at the same time. In this method, the total gaseous oxygen amount of the gaseous oxygen to be introduced through the center tube 1 together with the gaseous raw material of the organic silicon compound and the gaseous oxygen to be introduced through the second layer tube is made into 0.9-1.2 times of the theoretical oxygen amount necessary to the gaseous raw material on the mole basis.
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