发明名称 Interferometers utilizing polarization preserving optical systems
摘要 Interferometers utilizing polarization preserving optical systems by plane polarized beams are deviated through preselected angles without changing their linear state of polarization. The interferometers utilizing such optical systems have a variety of applications and are particularly suitable for use in the field of distance measuring interferometry (DMI) to enhance measurement accuracy by reducing undesirable polarization effects that can introduce errors associated with an otherwise present undesirable polarization rotation found in classical retroreflectors. Prismatic optical elements are preferably used to construct assemblies which can include polarization beam splitting coating arrangements and/or birefringent materials to enhance the extinction ratio between orthogonally polarized beams propagating through such systems.
申请公布号 US6201609(B1) 申请公布日期 2001.03.13
申请号 US19990384855 申请日期 1999.08.27
申请人 ZYGO CORPORATION 发明人 HILL HENRY ALLEN;DE GROOT PETER J.
分类号 G01B9/02;G02B5/30;G03F1/08;G03F7/20;H01L21/027;(IPC1-7):G01B9/02 主分类号 G01B9/02
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