发明名称 |
Metal-corrosion inhibitor and cleaning liquid |
摘要 |
There are provided a metal-corrosion inhibitor and a cleaning liquid comprising said corrosion inhibitor, which are suitable for cleaning semiconductor devices, and less than that so far in use in the possibility of affecting human health and the ecological system through a water medium, the corrosion inhibitor comprising an aliphatic alcohol compound having at least one mercapto group in the molecule, wherein a number of carbon atoms constituting said alcohol compound is not less than 2, and a carbon atom bonded with a mercato group and another carbon atom bonded with a hydroxyl group are contiguously bonded with each other.
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申请公布号 |
US6200947(B1) |
申请公布日期 |
2001.03.13 |
申请号 |
US20000484217 |
申请日期 |
2000.01.18 |
申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
TAKASHIMA MASAYUKI;SAWARA KENICHI |
分类号 |
H01L21/304;C11D7/06;C11D7/08;C11D7/34;C11D7/50;C11D11/00;C23F11/16;H01L21/3213;(IPC1-7):C11D9/04;C11D9/20;C03C23/00;C23G1/00;C23G1/02 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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