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发明名称
摘要
申请公布号	JP3145851(B2)	申请公布日期	2001.03.12
申请号	JP19930344941	申请日期	1993.12.20
申请人		发明人
分类号	C30B29/06;H01L21/02;H01L21/027;H01L21/265;H01L21/266;H01L21/336;H01L21/822;H01L29/04;H01L29/10;(IPC1-7):H01L21/02	主分类号	C30B29/06
代理机构		代理人
主权项
地址

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