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发明名称
Verfahren zur Verbesserung der Eigenschaften der Grenzfläche CaF2 auf Silizium
摘要
申请公布号
DE69329897(D1)
申请公布日期
2001.03.08
申请号
DE1993629897
申请日期
1993.02.18
申请人
TEXAS INSTRUMENTS INC., DALLAS
发明人
CHO, CHIH-CHEN;GNADE, BRUCE E.;LIU, HUNG-YU;KIM, TAE SEUNG;NISHIOKA, YASUSHIRO
分类号
C23C14/06;C23C14/58;C30B23/08;C30B33/00;H01L21/314;H01L21/324;(IPC1-7):H01L21/314;H01L21/20;H01L21/36
主分类号
C23C14/06
代理机构
代理人
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地址
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