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发明名称
Negativplatte zur Herstellung einer Schattenmaske und Verfahren zur Herstellung der Negativplatte
摘要
申请公布号
DE69132527(D1)
申请公布日期
2001.03.08
申请号
DE19916032527
申请日期
1991.11.22
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI
发明人
OHTAKE, YASUHISA;SAGO, SEIJI;MAGAKI, YASUSHI
分类号
H01J9/14;H01J29/07;(IPC1-7):H01J9/14
主分类号
H01J9/14
代理机构
代理人
主权项
地址
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