STORAGE CELL ARRAY AND A METHOD FOR THE MANUFACTURE THEREOF

摘要

The invention relates to a storage cell array with storage capacitors, each of which has a lower capacitor electrode (53), a capacitor dielectric (54) and an upper capacitor electrode which are at least partially located in a trench. At least one of the capacitor electrodes (53, 61) is a metallic electrode, in particular made of tungsten-silicide. The storage cell array can be manufactured with a required space of 8F<2> per storage cell.