UNSUPPORTED POLISHING BELT FOR CHEMICAL MECHANICAL POLISHING

摘要

A belt (102) for polishing a workpiece such as a semiconductor wafer (116) in a chemical mechanical polishing system (100) includes a polymeric layer forming an endless loop and having a polishing surface (140) on one side of the endless loop. The belt is manufactured by molding a polymeric material such as urethane in a cylindrical mold. The belt is thus made from a single layer, reducing weight, size, cost and maintenance requirements.