Method for controlling plasma-generating high frequency power, and plasma generating apparatus,申请号EP19990114077-传众专利搜索

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发明名称	Method for controlling plasma-generating high frequency power, and plasma generating apparatus
摘要
申请公布号	EP0975005(A3)	申请公布日期	2001.03.07
申请号	EP19990114077	申请日期	1999.07.20
申请人	THE PRESIDENT OF NAGOYA UNIVERSITY;NISSIN INC.	发明人	SUGAI, HIDEO;TAKASUGA, SEIICHI;TOYODA, NAOKI
分类号	H01L21/302;C23C16/52;H01J37/32;H01L21/3065;H05H1/00;H05H1/24;H05H1/46;(IPC1-7):H01J37/32	主分类号	H01L21/302
代理机构		代理人
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