| 摘要 |
An IC testing apparatus in which an accident occurring when a measurement part mounted on a test head is changed can be avoided. A type signal generating device 301 is provided on each of measurement parts so that a type signal TYPE can be sent from the type signal generating device 301 when a measurement part 300 is mounted on a test head 200. The type signal is read by a type signal reading device 102 provided in an IC tester 100. The type signal is transmitted to a handler 400 together with the number of simultaneous tests SUM extracted from a test program loaded in a main controller 101 of the IC tester. In the handler, a decision device 402 determines, based on the transmitted number of simultaneous tests and the type signal, whether or not the test program is proper and whether or not the arrangement of IC sockets set in the handler coincides with the arrangement of IC sockets of the measurement part. A start/stop controller 104 provided in the IC tester generates a start instruction to start a test when all of the decision results are "good", or generates a stop-of-start instruction to prevent the IC tester from starting when even one of the decision results is "no-good".
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