| 摘要 |
A lighting device of inspection equipment for a flat display panel is provided to perform transmission lighting for a glass panel placed on a glass table even when a light source is not disposed in a lower side of the glass table, thereby improving utilization efficiency of a lower side space of the glass table. In an optical axis direction of a microscope(12), a glass panel is installed. A light source(3) irradiates light diagonally to a glass table(21) and is installed together with the glass panel so as to be adjacent to the upper side microscope of the glass table. In a lower side of the glass table, a reflection unit(4) is installed. The reflection unit transmits light applied from the light source to the microscope. |
