发明名称 Semiconductor device including several transistors and method of manufacturing the same
摘要 In a semiconductor device including high-voltage, middle-voltage, and low voltage transistors having operating voltages different from one another, a gate length and a thickness of a gate oxide film are increased as the operating voltage is increased. Accordingly, in the high-voltage transistor, an electric field produced at a channel is relaxed. In the low-voltage transistor, a structure is made finer. A concentration of a well and an impurity amount implanted into a surface portion of a substrate are set to be identical with each other in all the transistors. Accordingly, the semiconductor device can be speedily manufactured at a high yield.
申请公布号 US6198140(B1) 申请公布日期 2001.03.06
申请号 US19990391449 申请日期 1999.09.08
申请人 DENSO CORPORATION 发明人 MURAMOTO HIDETOSHI;ISOBE YOSHIHIKO
分类号 H01L21/8234;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/8234
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