发明名称 OPTICAL MODULATION DEVICE, DISPLAY DEVICE, METHOD FOR DRIVING OPTICAL MODULATION DEVICE AND PRODUCTION THEREOF
摘要 PROBLEM TO BE SOLVED: To enhance modulation efficiency and to enable relatively easy modulation every one picture element. SOLUTION: This device has a constitution which is composed of a mirror element 20 which has a piezoelectric element 30 which consists of a piezoelectric body layer 33 and a first and a second electrodes 32, 34 between which the piezoelectric body layer is held and has a mirror film structure 35 which reflects light, and a driving element 50 which is disposed corresponding to the mirror element 20. In such a case, the mirror elements 20 are plurally disposed in one picture element and, at the same time, the respective piezoelectric elements 30 are supported on the end part confronting the peripheral part of the region which constitutes one picture element via a supporting part 21 in the state of cantilever on a substrate 11.
申请公布号 JP2001059943(A) 申请公布日期 2001.03.06
申请号 JP19990235413 申请日期 1999.08.23
申请人 SEIKO EPSON CORP 发明人 KAMEI HIROYUKI
分类号 G02B26/08;(IPC1-7):G02B26/08 主分类号 G02B26/08
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