发明名称 Thin film magnetic head having non-linear tapered rails
摘要 A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85°. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60° and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH2FCF3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic bead and magnetic disc.
申请公布号 US6198601(B1) 申请公布日期 2001.03.06
申请号 US19990268711 申请日期 1999.03.16
申请人 HITACHI, LTD. 发明人 HIRA YASUO;TOBA TAMAKI;IMAYAMA HIROTAKA;OHKAWA ATSUKO;FUJISAWA MASAYASU;NATE KAZUO;SONOBE HIDEKI;SUZUKI SABURO;TOGAWA EISEI;ISHIZAKI HIROSHI;HAGIWARA YOSHIKI
分类号 B23K15/00;C23F4/00;G11B5/31;G11B5/60;H01L21/302;H01L21/3065;(IPC1-7):G11B5/60 主分类号 B23K15/00
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