| 摘要 |
An upper electrode film includes a first conductive oxidation layer made of an oxide expressed by a chemical formula M<SUB>1</SUB>O<SUB>x2</SUB>, a second conductive oxidation layer made of an oxide expressed by a chemical formula M<SUB>2</SUB>O<SUB>y2 </SUB>and a third conductive oxidation layer. Here, the second conductive oxidation layer is formed to have a degree of oxidation higher than the first conductive oxidation layer and the third conductive oxidation layer, and among the composition parameters x<SUB>1</SUB>, x<SUB>2</SUB>, y<SUB>1</SUB>, y<SUB>2</SUB>, z<SUB>1 </SUB>and z<SUB>2</SUB>, there are the following relations, <?in-line-formulae description="In-line Formulae" end="lead"?>y<SUB>2</SUB>/y<SUB>1</SUB>>x<SUB>2</SUB>/x<SUB>1</SUB>, y<SUB>2</SUB>/y<SUB>1</SUB>>z<SUB>2</SUB>/z<SUB>1</SUB>, and z<SUB>2</SUB>/z<SUB>1</SUB>>=x<SUB>2</SUB>/x<SUB>1</SUB>.<?in-line-formulae description="In-line Formulae" end="tail"?>
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