NOZZLE, DRY CLEANER, DRY CLEANER SYSTEM

摘要

Provided is a dry cleaner capable of removing an adhesion excellently from the surface of a substrate. The dry cleaner for removing an adhesion from a discharged object (10) comprises a nozzle (16) arranged at a predetermined spacing from the discharged object and including a bulging shape (16c) having a reserving portion (16a) for reserving compressed air therein and a slit discharge port (16b) communicating with the reserving portion (16a). The bulging shape (16c) has a predetermined curvature as such a sectional shape as is perpendicular, at the position of the discharge port, to the extending direction of the discharge port. This discharge port is formed at the position the closest to the discharged object. Further comprised is a housing (18) containing the nozzle therein and including an opening (18a) for passing both the compressed air to be discharged from the discharge port of the nozzle in the direction substantially perpendicular to the discharged object and the compressed air having swept the surface of the discharged object, and a passage (18b) for passing the compressed air having flown along the bulging shape of the nozzle having the predetermined curvature. Still further comprised is a discharge portion (18c) for discharging the compressed air having flown along the bulging shape of the predetermined curvature.