| 摘要 |
PROBLEM TO BE SOLVED: To reduce the progress of the deterioration of a sensor by preventing storing incident lights from being wastefully made incident on the sensor. SOLUTION: First and second beam splitters 23 and 29 for branching one part of illuminating lights IL from an excimer laser light source 14 to a wafer stage RST are arranged on the optical path of the illuminating lights IL. Then, openable/closeable and movable first and third shutters 61 and 66 are respectively arranged between each beam splitter 23 and 29, and between an integrator sensor 50 and an energy sensor 54. Then, at washing of an illuminating optical system 12 and a projecting optical system 13, the first and third shutters 61 and 66 are moved and arranged at the closed positions, so that the illuminating lights IL as washing lights to be made incident to each sensor 50 and 54 can be interrupted.
|
