发明名称 SUCTION APPARATUS, SUCTION UNIT, MOUNTING DEVICE, AND SUCTION AND MOUNTING METHOD OF CONDUCTIVE MEMBER, SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide a suction device of a conductive member that can efficiently conduct suction of the conductive member. SOLUTION: This suction device of a conductive member is equipped with a suction apparatus 110 with a suction unit 112 for sucking a conductive member 100, and force supply equipment 120. The force supply equipment 120 applies force that maintains the suction state, when one conductive member 100 is sucked by the suction part 112, and at the same, time releases the suction state of the conductive member 100, when two conductive members 100 are sucked by the suction unit 112.</p>
申请公布号 JP2001060595(A) 申请公布日期 2001.03.06
申请号 JP20000141199 申请日期 2000.05.15
申请人 SEIKO EPSON CORP 发明人 SHIOZAWA MASAKUNI;SHINDO TOMOYUKI
分类号 H01L21/60;B23K3/06;H01L21/48;H01L21/683;H05K3/34;(IPC1-7):H01L21/60 主分类号 H01L21/60
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