发明名称 Mechanical wet air generator
摘要 A mechanical wet air generator which is constructed by an inner container, an outer container, a fluid level controller and a multiplicity of Rashing rings filled in the inner container is provided. In the wet air generator, the inner container is formed of honeycomb panels such that large bubbles cannot go through and furthermore, the multiplicity of Rashing rings functions as bubble-breaking solid shapes further prevents large bubbles from exiting the wet air generator and insuring the proper functioning of the generator. The present invention novel mechanical wet air generator is provided with a fluid level controller which consists of a floater, a floating valve, and a linkage connecting thereinbetween. The novel fluid level controller effectively prevents any possibility of overflow of fluid, or water, into a slurry supply pipe to which the wet air generator supplies a wet air or wet N2 for transporting and for blanketing the slurry solution. The present invention novel wet air generator effectively increases the % RH of clean dry air from 10~40% to 70~99%.
申请公布号 US6196526(B1) 申请公布日期 2001.03.06
申请号 US19990366225 申请日期 1999.08.03
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD 发明人 LEE HANG-CHANG;TSAI LONG CHUN;HSU MING-TZUNG
分类号 B01D19/02;B01D45/02;(IPC1-7):B01F3/04;B01D19/00 主分类号 B01D19/02
代理机构 代理人
主权项
地址