| 摘要 |
PROBLEM TO BE SOLVED: To enable stable contact of a contact probe even when a substrate of liquid crystal display panel to be inspected lacks in strength. SOLUTION: An attaching member 9 on which the contact probe 3 and a patch plate 4 are fixed is connected to the same direct-acting guide 5 and is guided so as to vertically move with respect to the surface on which a lead electrode 1a of the liquid crystal display panel 1 is formed. The attaching member 9 is connected respectively to nuts 6a, 6b which are fitted into respective screw parts which are subjected to cutting in different directions in a lateral feed screw 6. By rotating the lateral feed screw 6 by means of an AC servomotor 7 which is one driving source, the contact probe 3 and the patch plate 4 connected to the nuts 6a, 6b are moved so as to get near or leave apart each other and the clamping contact is achieved.
|
