DEVICE FOR DETACHING PLATE EQUIPPED IN SUBSTRATE PROCESSING APPARATUS AND METHOD OF DETACHING PLATE USING THE SAME

摘要

An apparatus for detaching a plate in a substrate processing apparatus is provided to prevent a member in a substrate processing apparatus from being damaged by eliminating the need to apply excessive force for detaching plate structures. An apparatus(100) for detaching a plate in a substrate processing apparatus includes a first plate installed in the substrate processing apparatus and a second plate stacked on the first plate, including a body(110) having an opening through which the second plate passes and a separation member(120) coupled to the body. The separation member is interposed between a first support bar coupled to the first plate and a second support bar coupled to the second plate to detach the first and second plates from each other. The body is a circular ring shape, and a plurality of separation members can be installed along the circumferential direction of the body.