SEMICONDUCTOR PLANT AUTOMATING SYSTEM, METHOD FOR CONTROLLING AUTOMATICALLY GUIDED VEHICLE, AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To effectively control an automatic guided vehicle by providing a control means which confirms the operation mode of the treatment performed on semiconductor wafers stored in a storing means, in response to a cue and a means which pulls out a semiconductor wafer lot in response to a cue from the control means. SOLUTION: A semiconductor producing bay 400 is provided with process equipment(EQ) 204, a stocker 216, and an automatic guided vehicle(AGV) 214. The EQ 204 treats a semiconductor wafer to obtain a semiconductor element and has etching equipment, photolithographic equipment, furnace equipment, etc., and the stocker 216 temporarily stores many semiconductor wafer cassettes. Each cassette contains a lot, having a prescribed number of semiconductor wafers and is transported to the EQ 204 by means of the AGV 214. The semiconductor wafer cassettes stored in the stocker 216 are transported to another semiconductor producing bay 400.