| 摘要 |
PROBLEM TO BE SOLVED: To treat surfaces of a treated object to high quality, with efficiency, with power and gas reduced, with favorable economy, and entirely homogeneously, by effectively utilizing chemically active neutral excitation species to the maximum without causing damage due to ions or electrons. SOLUTION: In this swirl-type atmospheric plasma treatment device, a flat plate-like high-voltage electrode 1 and a ground electrode 6 using punching metal are disposed opposite to each other with an insulator 5 put between them to form a discharge part 4 made up of minute gaps between the two electrodes 1, 6, and a mixed reaction gas is supplied, so as to form a swirl, to the discharge part 4 through a plurality of slit-shaped gas supply ports 14A formed in peripheral parts of the electrodes 1, 6. By generating glow discharge plasma by the application of high-frequency voltage, the mixed reaction gas is excited and decomposed to produce a gas flow including chemically active neutral excitation species, and the gas flow is applied to surfaces of a processed object oppositely disposed outside the discharge part 4 through a multiplicity of gas blow-out holes 3 disposed over the whole surface of the ground electrode 6. |
