| 摘要 |
PROBLEM TO BE SOLVED: To obtain an apparatus for generating plasma by exciting microwaves. SOLUTION: This apparatus is provided with a barrier made of a conductive material and installed between at least two microwave radiating apparatuses 8, 9 installed in a plasma volume. The microwaves radiated from these two microwave radiating apparatuses 8, 9 are mutually affected and consequently, inhibition of transposition of a considerable portion of the electric power of the microwave radiating apparatuses 8, 9 can be avoided at the time of plasma generation. |
